Technical Specifications for Pipeline System Design in Electronic Materials Production
Electronic materials production has strict requirements on the cleanliness and transportation accuracy of pipeline systems, and their design must comply with a number of professional technical specifications. Firstly, pipeline material selection - for high-purity electronic chemicals (such as photoresist and electronic-grade silane), 316L EP-grade stainless steel pipelines must be used. The inner wall of the pipeline is treated by electrochemical polishing, and the roughness reaches below Ra 0.025μm to avoid impurity adsorption. Secondly, pipeline connection method - double ferrule connection is adopted to replace the traditional welding connection, reducing the weld beads and dead corners on the inner wall of the pipeline, and facilitating disassembly and cleaning. The leakage rate of the connection part must be controlled below 1×10-9Pa·m3/s. Finally, pipeline layout design - the principle of "short path and low dead angle" must be followed, and the pipeline slope is set to 1‰-3‰ to avoid material retention. At the same time, it is equipped with an online particle counter and purity monitor to monitor the impurity content in the pipeline in real time and ensure that electronic materials are not contaminated during transportation.
Oct 30,2025
Electronic materials production has strict requirements on the cleanliness and transportation accuracy of pipeline systems, and their design must comply with a number of professional technical specifications. Firstly, pipeline material selection - for high-purity electronic chemicals (such as photoresist and electronic-grade silane), 316L EP-grade stainless steel pipelines must be used. The inner wall of the pipeline is treated by electrochemical polishing, and the roughness reaches below Ra 0.025μm to avoid impurity adsorption. Secondly, pipeline connection method - double ferrule connection is adopted to replace the traditional welding connection, reducing the weld beads and dead corners on the inner wall of the pipeline, and facilitating disassembly and cleaning. The leakage rate of the connection part must be controlled below 1×10-9Pa·m3/s. Finally, pipeline layout design - the principle of "short path and low dead angle" must be followed, and the pipeline slope is set to 1‰-3‰ to avoid material retention. At the same time, it is equipped with an online particle counter and purity monitor to monitor the impurity content in the pipeline in real time and ensure that electronic materials are not contaminated during transportation.
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